Low-Frequency Bi-Directional Microphone Based on a Combination of Bionic MEMS Diaphragm and Fiber Acousto-Optic Transducer

This paper reports on a fiber-optic directional microphone with a bionic MEMS diaphragm for low-frequency sound source localization. The diaphragm consists of two 3 mm \times3 mm wings connected by a 1 mm \times1 mm bridge, and two 0.2 mm \times0.1 mm torsion beams anchor the diaphragm to the...

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