11‐4: Ionization Electric‐Field Organic Material Deposition Method for Reducing Shadow‐Mask Effect

To make a full‐color high‐resolution organic light emitting diodes (OLEDs) device, it is necessary to reduce mask shadow effect. The ionization‐electric field organic material deposition was proposed as an advanced method of organic material thin film deposition to reduce mask shadow effect. The org...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2021-05, Vol.52 (1), p.135-138
Hauptverfasser: Park, Heemin, Song, Seungyong, Lee, Duckjung, Park, Jungsun, Park, Yeongje, Park, Wonhyeok, Kim, Sangsoo, Chu, Hyeyong
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container_title SID International Symposium Digest of technical papers
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creator Park, Heemin
Song, Seungyong
Lee, Duckjung
Park, Jungsun
Park, Yeongje
Park, Wonhyeok
Kim, Sangsoo
Chu, Hyeyong
description To make a full‐color high‐resolution organic light emitting diodes (OLEDs) device, it is necessary to reduce mask shadow effect. The ionization‐electric field organic material deposition was proposed as an advanced method of organic material thin film deposition to reduce mask shadow effect. The organic material was ionized by contact with tungsten (W) metal mesh in vacuum chamber to which the electric field was applied to induce the organic material to be incident vertically with to the substrate. As a result, mask shadow effect was reduced by electric field without changing OLEDs device characteristics.
doi_str_mv 10.1002/sdtp.14629
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source Wiley Online Library Journals Frontfile Complete
subjects Deposition
Electric contacts
electric field
Electric fields
Ionization
mask shadow effect
OLEDs
Organic light emitting diodes
Shadows
Substrates
Thin films
Tungsten
Vacuum chambers
title 11‐4: Ionization Electric‐Field Organic Material Deposition Method for Reducing Shadow‐Mask Effect
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