Thermal Behavior of Mixtures of Zirconium(IV) and Yttrium(III) Dipivaloylmethanates

The thermal properties of individual precursors, zirconium(IV) and yttrium(III) dipivaloylmethanates, and of their mixtures [Zr(thd) 4 –Y(thd) 3 , Hthd = 2,2,6,6-tetramethylheptane-3,5-dione] used for preparing mixed oxide films by chemical vapor deposition were studied in the condensed and gas phas...

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Veröffentlicht in:	Russian journal of applied chemistry 2021, Vol.94 (4), p.450-456
Hauptverfasser:	Turgambaeva, A. E., Zherikova, K. V., Mosyagina, S. A., Krisyuk, V. V., Lukashov, V. V., Igumenov, I. K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Chemistry Chemistry and Materials Science Chemistry/Food Science Diketones Industrial Chemistry/Chemical Engineering Inorganic Synthesis and Industrial Inorganic Chemistry Oxide coatings Phase composition Precursors Spectrometry Thermal decomposition Thermal stability Thermodynamic properties Vapor phases Vaporization Vaporizers Yttrium Zirconium
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