Nanoscale silicon fluidic transfer for ultrahigh-density self-assembled integration

Fluidic self-assembly is an efficient fabrication technique that a large number of semiconductor chips are spontaneously integrated. However, the integrated chips in the experiments reported so far had dimensions of several tens of micrometers for the side lengths and thickness, hindered by the seve...

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Veröffentlicht in:Nano express 2020-06, Vol.1 (1), p.10063
Hauptverfasser: Ishihara, Shoji, Tanabe, Katsuaki
Format: Artikel
Sprache:eng
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