Insight of mechanical and morphological properties of ALD- Al2O3 films in point of structural properties

Aluminum oxide (Al 2 O 3 ) has revealed many applications in diverse areas from optoelectronic devices to passivation according to its some physical, chemical, and mechanical properties. So, this paper focuses on the effect of structural changes on film properties in the point of post-annealing temp...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2021-06, Vol.127 (6), Article 460
Hauptverfasser:	Nalcaci, Burak, Polat Gonullu, Meryem
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum oxide Annealing Applied physics Argon Atomic force microscopy Atomic layer epitaxy Atomic properties Characterization and Evaluation of Materials Condensed Matter Physics Crystal structure Crystallography Gas flow Interdiffusion Machines Manufacturing Materials science Mechanical properties Microscopy Morphology Nanoindentation Nanotechnology Optical and Electronic Materials Optoelectronic devices Physics Physics and Astronomy Processes Silicon substrates Surface roughness Surfaces and Interfaces Thin Films
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