Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure
Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) are attractive for ultrasonic imaging, which can meet the requirements of large detection depth and high resolution simultaneously. In this letter, we propose a dual-frequency pMUT via beam-membrane coupled structure. The beam...
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| Veröffentlicht in: | IEEE electron device letters 2021-06, Vol.42 (6), p.919-922 |
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| creator | Chen, Xuying Qu, Mengjiao Zhu, Ke Xie, Jin |
| description | Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) are attractive for ultrasonic imaging, which can meet the requirements of large detection depth and high resolution simultaneously. In this letter, we propose a dual-frequency pMUT via beam-membrane coupled structure. The beam-membrane coupled pMUTs (BM-pMUTs) inherently have two fundamental resonant frequencies, corresponding to in-phase and out-of-phase modes. The dual-electrode design is utilized to compensate the sensitivity of out-of-phase mode, hence the BM-pMUTs maintain high sensitivity for both two operation modes. Experimental results show that the optimal transmitting sensitivities of BM-pMUTs are 18 nm/V at 103 kHz and 26 nm/V at 220 kHz when characterized in oil, as well as the optimal receiving sensitivities are 572.1 mV/MPa at 103 kHz and 581.8 mV/MPa at 220 kHz. |
| doi_str_mv | 10.1109/LED.2021.3075853 |
| format | Article |
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In this letter, we propose a dual-frequency pMUT via beam-membrane coupled structure. The beam-membrane coupled pMUTs (BM-pMUTs) inherently have two fundamental resonant frequencies, corresponding to in-phase and out-of-phase modes. The dual-electrode design is utilized to compensate the sensitivity of out-of-phase mode, hence the BM-pMUTs maintain high sensitivity for both two operation modes. Experimental results show that the optimal transmitting sensitivities of BM-pMUTs are 18 nm/V at 103 kHz and 26 nm/V at 220 kHz when characterized in oil, as well as the optimal receiving sensitivities are 572.1 mV/MPa at 103 kHz and 581.8 mV/MPa at 220 kHz.</description><identifier>ISSN: 0741-3106</identifier><identifier>EISSN: 1558-0563</identifier><identifier>DOI: 10.1109/LED.2021.3075853</identifier><identifier>CODEN: EDLEDZ</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Acoustics ; dual frequency ; Electrodes ; Imaging ; Membranes ; Micromachining ; Piezoelectric micromachined ultrasonic transducers (pMUTs) ; Piezoelectricity ; Resonant frequencies ; Resonant frequency ; Sensitivity ; Stress ; Transducers ; Ultrasonic imaging ; Ultrasonic testing ; Ultrasonic transducers ; ultrasound</subject><ispartof>IEEE electron device letters, 2021-06, Vol.42 (6), p.919-922</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2021</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c291t-274deda228b957cc79a23b856f4733a3704969f8899986975cf8a3eb086f4f843</citedby><cites>FETCH-LOGICAL-c291t-274deda228b957cc79a23b856f4733a3704969f8899986975cf8a3eb086f4f843</cites><orcidid>0000-0002-3577-4722 ; 0000-0003-4048-0259 ; 0000-0003-3942-3046</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9416476$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/9416476$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Chen, Xuying</creatorcontrib><creatorcontrib>Qu, Mengjiao</creatorcontrib><creatorcontrib>Zhu, Ke</creatorcontrib><creatorcontrib>Xie, Jin</creatorcontrib><title>Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure</title><title>IEEE electron device letters</title><addtitle>LED</addtitle><description>Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) are attractive for ultrasonic imaging, which can meet the requirements of large detection depth and high resolution simultaneously. In this letter, we propose a dual-frequency pMUT via beam-membrane coupled structure. The beam-membrane coupled pMUTs (BM-pMUTs) inherently have two fundamental resonant frequencies, corresponding to in-phase and out-of-phase modes. The dual-electrode design is utilized to compensate the sensitivity of out-of-phase mode, hence the BM-pMUTs maintain high sensitivity for both two operation modes. Experimental results show that the optimal transmitting sensitivities of BM-pMUTs are 18 nm/V at 103 kHz and 26 nm/V at 220 kHz when characterized in oil, as well as the optimal receiving sensitivities are 572.1 mV/MPa at 103 kHz and 581.8 mV/MPa at 220 kHz.</description><subject>Acoustics</subject><subject>dual frequency</subject><subject>Electrodes</subject><subject>Imaging</subject><subject>Membranes</subject><subject>Micromachining</subject><subject>Piezoelectric micromachined ultrasonic transducers (pMUTs)</subject><subject>Piezoelectricity</subject><subject>Resonant frequencies</subject><subject>Resonant frequency</subject><subject>Sensitivity</subject><subject>Stress</subject><subject>Transducers</subject><subject>Ultrasonic imaging</subject><subject>Ultrasonic testing</subject><subject>Ultrasonic transducers</subject><subject>ultrasound</subject><issn>0741-3106</issn><issn>1558-0563</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kMtLAzEQh4MoWKt3wcuC5615bpKj9qFCi4LtOWSzs7hlHzXZLdS_3pQWTwMz32-G-RC6J3hCCNZPy_lsQjElE4alUIJdoBERQqVYZOwSjbDkJGUEZ9foJoQtxoRzyUcIZoOt04WHnwFad0g-K_jtoAbX-8olq8r5rrHuu2qhSDZ1723o2jhYe9uGYnDgQ7KvbPICtklX0OSxD8m0G3Z1DHz1fnD94OEWXZW2DnB3rmO0WczX07d0-fH6Pn1epo5q0qdU8gIKS6nKtZDOSW0py5XISi4Zs0xirjNdKqW1VpmWwpXKMsixikSpOBujx9Pene_iQ6E3227wbTxpqGCYEKkxjRQ-UfG5EDyUZuerxvqDIdgcZZoo0xxlmrPMGHk4RSoA-Mc1JxmXGfsDBglwaw</recordid><startdate>20210601</startdate><enddate>20210601</enddate><creator>Chen, Xuying</creator><creator>Qu, Mengjiao</creator><creator>Zhu, Ke</creator><creator>Xie, Jin</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-3577-4722</orcidid><orcidid>https://orcid.org/0000-0003-4048-0259</orcidid><orcidid>https://orcid.org/0000-0003-3942-3046</orcidid></search><sort><creationdate>20210601</creationdate><title>Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure</title><author>Chen, Xuying ; Qu, Mengjiao ; Zhu, Ke ; Xie, Jin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c291t-274deda228b957cc79a23b856f4733a3704969f8899986975cf8a3eb086f4f843</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Acoustics</topic><topic>dual frequency</topic><topic>Electrodes</topic><topic>Imaging</topic><topic>Membranes</topic><topic>Micromachining</topic><topic>Piezoelectric micromachined ultrasonic transducers (pMUTs)</topic><topic>Piezoelectricity</topic><topic>Resonant frequencies</topic><topic>Resonant frequency</topic><topic>Sensitivity</topic><topic>Stress</topic><topic>Transducers</topic><topic>Ultrasonic imaging</topic><topic>Ultrasonic testing</topic><topic>Ultrasonic transducers</topic><topic>ultrasound</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Chen, Xuying</creatorcontrib><creatorcontrib>Qu, Mengjiao</creatorcontrib><creatorcontrib>Zhu, Ke</creatorcontrib><creatorcontrib>Xie, Jin</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE electron device letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Chen, Xuying</au><au>Qu, Mengjiao</au><au>Zhu, Ke</au><au>Xie, Jin</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure</atitle><jtitle>IEEE electron device letters</jtitle><stitle>LED</stitle><date>2021-06-01</date><risdate>2021</risdate><volume>42</volume><issue>6</issue><spage>919</spage><epage>922</epage><pages>919-922</pages><issn>0741-3106</issn><eissn>1558-0563</eissn><coden>EDLEDZ</coden><abstract>Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) are attractive for ultrasonic imaging, which can meet the requirements of large detection depth and high resolution simultaneously. In this letter, we propose a dual-frequency pMUT via beam-membrane coupled structure. The beam-membrane coupled pMUTs (BM-pMUTs) inherently have two fundamental resonant frequencies, corresponding to in-phase and out-of-phase modes. The dual-electrode design is utilized to compensate the sensitivity of out-of-phase mode, hence the BM-pMUTs maintain high sensitivity for both two operation modes. Experimental results show that the optimal transmitting sensitivities of BM-pMUTs are 18 nm/V at 103 kHz and 26 nm/V at 220 kHz when characterized in oil, as well as the optimal receiving sensitivities are 572.1 mV/MPa at 103 kHz and 581.8 mV/MPa at 220 kHz.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/LED.2021.3075853</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0002-3577-4722</orcidid><orcidid>https://orcid.org/0000-0003-4048-0259</orcidid><orcidid>https://orcid.org/0000-0003-3942-3046</orcidid></addata></record> |
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| subjects | Acoustics dual frequency Electrodes Imaging Membranes Micromachining Piezoelectric micromachined ultrasonic transducers (pMUTs) Piezoelectricity Resonant frequencies Resonant frequency Sensitivity Stress Transducers Ultrasonic imaging Ultrasonic testing Ultrasonic transducers ultrasound |
| title | Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure |
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