Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Manganese Oxide and Obtained by Laser Deposition

Nanostructured thin films on a silicon substrate were obtained on a ceramic of zinc oxide doped with manganese oxide by high-frequency periodic pulsed laser action with f ~ 10–15 kHz, wavelength λ = 1.064 μm at power density q = 150 MW/cm 2 in a vacuum chamber with p = 2.7 Pa. The surface morphology...

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Veröffentlicht in:Journal of applied spectroscopy 2021-08, Vol.88 (2), p.283-288
Hauptverfasser: Bosak, N. A., Chumakov, A. N., Shevchenok, A. A., Baran, L. V., Karoza, A. G., Malutina-Bronskaya, V. V., Ivanov, A. A.
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container_issue 2
container_start_page 283
container_title Journal of applied spectroscopy
container_volume 88
creator Bosak, N. A.
Chumakov, A. N.
Shevchenok, A. A.
Baran, L. V.
Karoza, A. G.
Malutina-Bronskaya, V. V.
Ivanov, A. A.
description Nanostructured thin films on a silicon substrate were obtained on a ceramic of zinc oxide doped with manganese oxide by high-frequency periodic pulsed laser action with f ~ 10–15 kHz, wavelength λ = 1.064 μm at power density q = 150 MW/cm 2 in a vacuum chamber with p = 2.7 Pa. The surface morphology and the elemental composition of the obtained films were studied using atomic force microscopy, scanning electron microscopy, and X-ray spectral microanalysis. Features of the transmission spectra in the visible, near, and middle IR regions were determined. The electrophysical properties of the ZnO + 2% MnO 2 /Si heterostructure were analyzed.
doi_str_mv 10.1007/s10812-021-01170-y
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subjects Analysis
Analytical Chemistry
Atomic force microscopy
Atomic/Molecular Structure and Spectra
Dielectric films
Heterostructures
Laser deposition
Manganese dioxide
Manganese oxides
Microscopy
Morphology
Optical properties
Oxide coatings
Physics
Physics and Astronomy
Pulsed lasers
Silicon
Silicon substrates
Thin films
Vacuum chambers
X ray spectra
Zinc oxide
Zinc oxides
title Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Manganese Oxide and Obtained by Laser Deposition
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