Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Manganese Oxide and Obtained by Laser Deposition

Nanostructured thin films on a silicon substrate were obtained on a ceramic of zinc oxide doped with manganese oxide by high-frequency periodic pulsed laser action with f ~ 10–15 kHz, wavelength λ = 1.064 μm at power density q = 150 MW/cm 2 in a vacuum chamber with p = 2.7 Pa. The surface morphology...

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Veröffentlicht in:	Journal of applied spectroscopy 2021-08, Vol.88 (2), p.283-288
Hauptverfasser:	Bosak, N. A., Chumakov, A. N., Shevchenok, A. A., Baran, L. V., Karoza, A. G., Malutina-Bronskaya, V. V., Ivanov, A. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysis Analytical Chemistry Atomic force microscopy Atomic/Molecular Structure and Spectra Dielectric films Heterostructures Laser deposition Manganese dioxide Manganese oxides Microscopy Morphology Optical properties Oxide coatings Physics Physics and Astronomy Pulsed lasers Silicon Silicon substrates Thin films Vacuum chambers X ray spectra Zinc oxide Zinc oxides
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Zusammenfassung:	Nanostructured thin films on a silicon substrate were obtained on a ceramic of zinc oxide doped with manganese oxide by high-frequency periodic pulsed laser action with f ~ 10–15 kHz, wavelength λ = 1.064 μm at power density q = 150 MW/cm 2 in a vacuum chamber with p = 2.7 Pa. The surface morphology and the elemental composition of the obtained films were studied using atomic force microscopy, scanning electron microscopy, and X-ray spectral microanalysis. Features of the transmission spectra in the visible, near, and middle IR regions were determined. The electrophysical properties of the ZnO + 2% MnO 2 /Si heterostructure were analyzed.
ISSN:	0021-9037 1573-8647
DOI:	10.1007/s10812-021-01170-y