Effects of aging on the thickness of a homogeneous film fabricated using a spin coating process

The thickness of the film produced by spin coating is different from the theoretically calculated thickness based on the Newtonian fluid equation. In this study, the rotational time and rotational speed (in revolutions per minute [RPM]) were used as the control parameters, and the thickness differen...

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Veröffentlicht in:	JCT research 2021-05, Vol.18 (3), p.641-647
Hauptverfasser:	Han, Do Hyung, Kim, Doyeon, Yun, Hye Won, Lee, Jinho, Lee, Un gi, Chung, Hyun Soo, Kim, Woo-Byoung
Format:	Artikel
Sprache:	eng
Schlagworte:	Aging Chemistry and Materials Science Corrosion and Coatings Heat treatment Industrial Chemistry/Chemical Engineering Materials Science Newtonian fluids Parameters Polymer Sciences Spin coating Statistical analysis Substrates Surfaces and Interfaces Thickness measurement Thin Films Tribology
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