Microfibrous Mesh and Polymer Damping of Micromachined Vibration Isolators

This article introduces the use of nickel (Ni) and copper (Cu) microfibrous meshes (MFMs) and Sorbothane and polydimethylsiloxane (PDMS) viscoelastic polymers to damp the dynamic response of a silicon micromachined vibration isolator (microisolator) for vibration reliability in mechanically harsh en...

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Veröffentlicht in:	IEEE transactions on components, packaging, and manufacturing technology (2011) packaging, and manufacturing technology (2011), 2021-04, Vol.11 (4), p.543-556
Hauptverfasser:	Bottenfield, Brent, Bond, Arthur Gernt, English, Brian A., Flowers, George T., Dean, Robert N., Adams, Mark L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acceleration Copper Damping Dynamic response Electric shock Finite element method Harsh environments Isolators MEMS Microelectromechanical systems micromachines Micromachining Nickel Polydimethylsiloxane Polymers Q-factor Reactive ion etching Sensitivity sensor performance Silicon Vibration damping vibration isolation Vibration isolators Vibrations viscoelastic damping
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