Synthesis of silicon spherical nanostructures in argon plasma

The paper presents the results of the synthesis of silicon nanospheres (silicon fullerenes) in argon plasma. During the experiment, silicon atoms were evaporated from the surface of a single crystal using a plasma jet. Silicon atoms were entrained by the flow of argon plasma and, as the plasma coole...

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Veröffentlicht in:	Journal of physics. Conference series 2021-04, Vol.1870 (1), p.12004
Hauptverfasser:	Timerkaev, B A, Feltsinger, V S, Gevorgian, R K, Shaikhattorov, R P, Kaleeva, A A
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon plasma Electrons Nanospheres Nanotubes Physics Plasma Plasma jets Silicon Single crystals Spherical plasmas Synthesis
Online-Zugang:	Volltext
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