Uncertainty in the mutual calibration method for the traceable thickness measurement of ultra-thin oxide films

Mutual calibration by a combination of a zero-offset method and a length-unit traceable method has been suggested as a promising approach to determine the traceable thickness of ultra-thin oxide films. However, the measurement uncertainty is somewhat complicated to calculate because the standard unc...

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Veröffentlicht in:	Metrologia 2021-06, Vol.58 (3), p.34002
Hauptverfasser:	Lee, Seung Mi, Woo, Jin Chun, Kim, Tae Gun, Kim, Kyung Joong
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Calibration Film thickness Mathematical analysis Measurement methods Oxide coatings Regression analysis Semiconductor devices Silicon substrates Thickness measurement Thin films Uncertainty
Online-Zugang:	Volltext
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