On the thickness scaling of ferroelectricity in Al0.78Sc0.22N films

Thickness scaling on ferroelectric properties of sputter-deposited poling-free Al0.78Sc0.22N films has been examined. The c-axis oriented films were confirmed by X-ray rocking curve measurements with a film as thin as 10 nm. Ferroelectric-type hysteresis and poling-free behaviors are observed from t...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2021-05, Vol.60 (SB)
Hauptverfasser:	Sung-Lin, Tsai, Hoshii, Takuya, Wakabayashi, Hitoshi, Tsutsui, Kazuo, Tien-Kan, Chung, Edward Yi Chang, Kakushima, Kuniyuki
Format:	Artikel
Sprache:	eng
Schlagworte:	Deoxidizing Ferroelectric materials Ferroelectricity Thick films Thickness
Online-Zugang:	Volltext
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