Characterization of Thermal Imprinting and Releasing of Resins using Micro-multi-fin Structured MEMS Mold for Structural Color Expression

This paper describes characterization of thermal imprinting of resins using a fabricated micro-multi-fin structured micro-electro-mechanical system（MEMS）mold to incorporate a structural color expression function.Through the MEMS fabrication process, micro-mold structures with 0.2-μm pitch inclined m...

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Veröffentlicht in:	Hyōmen gijutsu 2021/03/01, Vol.72(3), pp.170-175
Hauptverfasser:	YAHAGI, Toru, YAMADA, Naoya, MURAYAMA, Hiroki, KATO, Mutsuto, WATANABE, Yoshiyuki, ITO, Hiroshi, MINETA, Takashi
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Color Dynamic mechanical analysis Glass transition Light reflection MEMS Process Microelectromechanical systems Molding (process) Molds Multi-fin Structure Pitch (inclination) Polymethyl methacrylate Resins Silicon substrates Structural Color Thermal Imprint Thermodynamic properties
Online-Zugang:	Volltext
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