Formation of Fine Protrusions by Sputter Etching of Stainless Steels and Evaluation of Gripping Ability of Fiber Sheets

Argon ion sputter etching of AISI type 420 stainless steels was carried out at a power of 250 W for 14.4 ks to form cone-shaped protrusions with bottom diameters of 10–20 µm by using a radio-frequency magnetron sputter apparatus. The sputter etching was also applied to AISI type 316 stainless steel...

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Veröffentlicht in:International journal of precision engineering and manufacturing 2021-04, Vol.22 (4), p.689-696
Hauptverfasser: Nakamura, Masayoshi, Nakasa, Keijiro, Kitamika, Yudai, Gao, Sande, Sumomogi, Tsunetaka
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container_issue 4
container_start_page 689
container_title International journal of precision engineering and manufacturing
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creator Nakamura, Masayoshi
Nakasa, Keijiro
Kitamika, Yudai
Gao, Sande
Sumomogi, Tsunetaka
description Argon ion sputter etching of AISI type 420 stainless steels was carried out at a power of 250 W for 14.4 ks to form cone-shaped protrusions with bottom diameters of 10–20 µm by using a radio-frequency magnetron sputter apparatus. The sputter etching was also applied to AISI type 316 stainless steel at 250 W for 10.8 ks, and fine column-shaped protrusions with diameters smaller than 500 nm were formed. In addition, plasma-nitriding was applied to the protrusions of type 420 steel using nitrogen gas of 0.53 Pa mixed with argon gas of 0.67 Pa at a power of 50 W for 1.8 ks. The gripping ability of protrusions was measured by friction tests for three types of fiber sheets. For a cotton cloth, the friction coefficients of the as-sputter-etched and plasma-nitrided type 420 steel specimens were 1.3 and 1.7 at a nominal compressive stress of 0.8 kPa, and that of the as-sputter-etched type 316 steel specimen was 1.0. These are much larger than 0.8 and 0.5 of the specimens polished with #100 emery paper and buff-polished with alumina powders. Also for microfiber and polyester fiber sheets, the specimen with protrusions showed a higher gripping ability than those of the mechanically polished specimens. The reason for the large gripping ability of protrusion specimens is due to piercing of the protrusions between and into weaving yarns.
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J. Precis. Eng. Manuf</addtitle><description>Argon ion sputter etching of AISI type 420 stainless steels was carried out at a power of 250 W for 14.4 ks to form cone-shaped protrusions with bottom diameters of 10–20 µm by using a radio-frequency magnetron sputter apparatus. The sputter etching was also applied to AISI type 316 stainless steel at 250 W for 10.8 ks, and fine column-shaped protrusions with diameters smaller than 500 nm were formed. In addition, plasma-nitriding was applied to the protrusions of type 420 steel using nitrogen gas of 0.53 Pa mixed with argon gas of 0.67 Pa at a power of 50 W for 1.8 ks. The gripping ability of protrusions was measured by friction tests for three types of fiber sheets. For a cotton cloth, the friction coefficients of the as-sputter-etched and plasma-nitrided type 420 steel specimens were 1.3 and 1.7 at a nominal compressive stress of 0.8 kPa, and that of the as-sputter-etched type 316 steel specimen was 1.0. 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The reason for the large gripping ability of protrusion specimens is due to piercing of the protrusions between and into weaving yarns.</description><subject>Aluminum oxide</subject><subject>Argon ions</subject><subject>Austenitic stainless steels</subject><subject>Cloth</subject><subject>Coefficient of friction</subject><subject>Compressive properties</subject><subject>Cotton</subject><subject>Diameters</subject><subject>Engineering</subject><subject>Etching</subject><subject>Industrial and Production Engineering</subject><subject>Materials Science</subject><subject>Microfibers</subject><subject>Regular Paper</subject><subject>Sheets</subject><subject>Stainless steel</subject><subject>Yarns</subject><issn>2234-7593</issn><issn>2005-4602</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNp9kM1KAzEURoMoWLQv4CrgejS_k86ylLYKBYXqOiSZpI1MZ8Yko_TtTR3RnYvLvYTzfYEDwA1GdxghcR8x4QwXiORBrOIFOgMTghAvWInIeb4JZYXgFb0E0xi9RhSTkvJZOQGfqy4cVPJdCzsHV7618Dl0KQwxP0Woj3DbDynZAJfJ7H27O2HbpHzb2BjzZW0ToWpruPxQzfDbtA6-70_4XPvGp-PYrnPPdm9titfgwqkm2unPvgKvq-XL4qHYPK0fF_NNYRiuUqGFq4wS1GilRMVrgpydYSv4DDsqNDNYG1zWGnPHUFkxzBSjyOiyrivutKBX4Hbs7UP3PtiY5Fs3hDZ_KQlHpeAoK8wUGSkTuhiDdbIP_qDCUWIkT47l6Fhmx_LbsTyF6BiKGW53NvxV_5P6Ar5igAE</recordid><startdate>20210401</startdate><enddate>20210401</enddate><creator>Nakamura, Masayoshi</creator><creator>Nakasa, Keijiro</creator><creator>Kitamika, Yudai</creator><creator>Gao, Sande</creator><creator>Sumomogi, Tsunetaka</creator><general>Korean Society for Precision Engineering</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20210401</creationdate><title>Formation of Fine Protrusions by Sputter Etching of Stainless Steels and Evaluation of Gripping Ability of Fiber Sheets</title><author>Nakamura, Masayoshi ; Nakasa, Keijiro ; Kitamika, Yudai ; Gao, Sande ; Sumomogi, Tsunetaka</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c419t-b7f9ca73cbaa795d20fe81e7581f37b4c1bc16db15f4069414a430cb6dd95fb73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Aluminum oxide</topic><topic>Argon ions</topic><topic>Austenitic stainless steels</topic><topic>Cloth</topic><topic>Coefficient of friction</topic><topic>Compressive properties</topic><topic>Cotton</topic><topic>Diameters</topic><topic>Engineering</topic><topic>Etching</topic><topic>Industrial and Production Engineering</topic><topic>Materials Science</topic><topic>Microfibers</topic><topic>Regular Paper</topic><topic>Sheets</topic><topic>Stainless steel</topic><topic>Yarns</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Nakamura, Masayoshi</creatorcontrib><creatorcontrib>Nakasa, Keijiro</creatorcontrib><creatorcontrib>Kitamika, Yudai</creatorcontrib><creatorcontrib>Gao, Sande</creatorcontrib><creatorcontrib>Sumomogi, Tsunetaka</creatorcontrib><collection>CrossRef</collection><jtitle>International journal of precision engineering and manufacturing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Nakamura, Masayoshi</au><au>Nakasa, Keijiro</au><au>Kitamika, Yudai</au><au>Gao, Sande</au><au>Sumomogi, Tsunetaka</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Formation of Fine Protrusions by Sputter Etching of Stainless Steels and Evaluation of Gripping Ability of Fiber Sheets</atitle><jtitle>International journal of precision engineering and manufacturing</jtitle><stitle>Int. J. Precis. Eng. Manuf</stitle><date>2021-04-01</date><risdate>2021</risdate><volume>22</volume><issue>4</issue><spage>689</spage><epage>696</epage><pages>689-696</pages><issn>2234-7593</issn><eissn>2005-4602</eissn><abstract>Argon ion sputter etching of AISI type 420 stainless steels was carried out at a power of 250 W for 14.4 ks to form cone-shaped protrusions with bottom diameters of 10–20 µm by using a radio-frequency magnetron sputter apparatus. The sputter etching was also applied to AISI type 316 stainless steel at 250 W for 10.8 ks, and fine column-shaped protrusions with diameters smaller than 500 nm were formed. In addition, plasma-nitriding was applied to the protrusions of type 420 steel using nitrogen gas of 0.53 Pa mixed with argon gas of 0.67 Pa at a power of 50 W for 1.8 ks. The gripping ability of protrusions was measured by friction tests for three types of fiber sheets. 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subjects Aluminum oxide
Argon ions
Austenitic stainless steels
Cloth
Coefficient of friction
Compressive properties
Cotton
Diameters
Engineering
Etching
Industrial and Production Engineering
Materials Science
Microfibers
Regular Paper
Sheets
Stainless steel
Yarns
title Formation of Fine Protrusions by Sputter Etching of Stainless Steels and Evaluation of Gripping Ability of Fiber Sheets
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