Hot-Wire Chemical Vapor Deposition of Fluoropolymer Coatings on Rotating Cylindrical Surfaces

The method of hot-wire activated chemical vapor deposition (HW CVD) of fluoropolymer films has been adapted to obtain fluoropolymer coatings on rotating cylindrical surfaces of small radius (below 20 mm). The influence of the substrate rotation speed on the structure of thin fluoropolymer deposit wa...

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Veröffentlicht in:	Technical physics letters 2021-02, Vol.47 (2), p.205-207
Hauptverfasser:	Safonov, A. I., Starinskiy, S. V., Sulyaeva, V. S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Classical and Continuum Physics Coatings Fluoropolymers Morphology Physics Physics and Astronomy Rotation Substrates Wire
Online-Zugang:	Volltext
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