Speeding up carbon nanotube integrated circuits through three-dimensional architecture

Semiconducting carbon nanotube (CNT) field effect transistor (FET) is attractive for constructing three-dimensional (3D) integrated circuits (ICs) because of its low-temperature processes and low power dissipation. However, CNT based 3D ICs reported usually suffered from lower performance than that...

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Veröffentlicht in:	Nano research 2019-08, Vol.12 (8), p.1810-1816
Hauptverfasser:	Xie, Yunong, Zhang, Zhiyong, Zhong, Donglai, Peng, Lianmao
Format:	Artikel
Sprache:	eng
Schlagworte:	Architecture Atomic/Molecular Structure and Spectra Biomedicine Biotechnology Carbon nanotubes Chemistry and Materials Science Condensed Matter Physics Fabrication Field effect transistors Integrated circuits Low temperature Materials Science Multilayers Nanotechnology Research Article Semiconductor devices
Online-Zugang:	Volltext
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