Gold-vapor-assisted chemical vapor deposition of aligned monolayer WSe2 with large domain size and fast growth rate

Orientation-controlled growth of two-dimensional (2D) transition metal dichalcogenides (TMDCs) may enable many new electronic and optical applications. However, previous studies reporting aligned growth of WSe 2 usually yielded very small domain sizes. Herein, we introduced gold vapor into the chemi...

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Veröffentlicht in:	Nano research 2020-10, Vol.13 (10), p.2625-2631
Hauptverfasser:	Chen, Mingrui, Zhang, Anyi, Liu, Yihang, Cui, Dingzhou, Li, Zhen, Chung, Yu-Han, Mutyala, Sai Praneetha, Mecklenburg, Matthew, Nie, Xiao, Xu, Chi, Wu, Fanqi, Liu, Qingzhou, Zhou, Chongwu
Format:	Artikel
Sprache:	eng
Schlagworte:	Alignment Atomic/Molecular Structure and Spectra Biomedicine Biotechnology Catalysts Chemical vapor deposition Chemistry and Materials Science Condensed Matter Physics Domains Field effect transistors Flakes Gold Growth rate Materials Science Metal vapors Monolayers Nanotechnology Research Article Sapphire Semiconductor devices Silicon dioxide Silicon substrates Transition metal compounds Vapors
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