Design of an edge tapered 915 MHz/TM021 microwave plasma reactor by numerical analysis

Microwave plasma reactor is often of particular interest due to their wide range of industrial applications, especially in high-end manufacturing. However, there exist problems of unstable plasma and small discharge area in conventional microwave reactors at 2.45 GHz. An edge tapered 915 MHz/TM021 m...

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Veröffentlicht in:	AIP advances 2021-03, Vol.11 (3), p.035321-035321-8
Hauptverfasser:	Yan, Xinsheng, Zhao, Lianmin, Xu, Weiye, Chen, Longwei, Jia, Hua, Liu, Fukun
Format:	Artikel
Sprache:	eng
Schlagworte:	Conductors Coupling Electric field strength Hydrogen plasma Industrial applications Microwave plasmas Numerical analysis Plasma Plasma jets Reactors Simulation Two dimensional models
Online-Zugang:	Volltext
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