Metal-assisted chemical etching of high throughput, high aspect ratio critical-angle transmission gratings with vertical and smooth sidewalls

This paper reports the development of a critical-angle transmission (CAT) grating fabrication process based on metal-assisted chemical etching (MACE), from which grating prototypes with a period of 1  μ m were fabricated. The prototype was composed of four 5 mm × 5 mm membrane cells, each of which c...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2021-03, Vol.60 (3), p.35003
Hauptverfasser:	Zheng, Yanchang, Li, Cheng, Hu, Huakui, Huang, Shengzhou, Liu, Zhengkun, Wang, Hai
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical etching Etching High aspect ratio Prototypes Roughness Silicon wafers
Online-Zugang:	Volltext
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