A Comprehensive Fundamental Understanding of Atomic Layer Deposited Titanium Oxide Films for c-Si Solar Cell Applications

Titanium oxide (TiO x ) film shows excellent surface passivation of crystalline silicon (c-Si) as well as carrier selectivity. The coexistence of both these properties along with extraordinary optical properties of TiO x opens new opportunities to design novel high-performance c-Si solar cells. Howe...

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Veröffentlicht in:	IEEE journal of photovoltaics 2021-03, Vol.11 (2), p.319-328
Hauptverfasser:	Liao, Baochen, Dwivedi, Neeraj, Wang, Qiang, Yeo, Reuben J., Aberle, Armin G., Bhatia, Charanjit S., Danner, Aaron
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Atomic layer epitaxy Chemical bonds Crystal structure Crystallography Energy & Fuels Growth mechanism interface composition Materials Science Materials Science, Multidisciplinary Optical properties Optical refraction Optical surface waves Oxide coatings Passivation passivation mechanism Passivity Photovoltaic cells Physical Sciences Physics Physics, Applied Science & Technology Selectivity Silicon Solar cells Stoichiometry surface passivation Technology Temperature Temperature measurement titanium oxide Titanium oxides
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