Strengthening ultrathin Si3N4 membranes by compressive surface stress

[Display omitted] •Fracture strength of Si3N4 thin film membranes is studied using bulge test.•Compressive surface stress is created by Ar-ion bombardment or coating with an adlayer.•Two failure modes of membranes under applied pressure identified: extrinsic and intrinsic.•Compressive stress at the...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2021-01, Vol.317, p.112456, Article 112456
Hauptverfasser:	Shafikov, A., Schurink, B., van de Kruijs, R.W.E., Benschop, J., van den Beld, W.T.E., Houweling, Z.S., Bijkerk, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bulge testing Chemical vapor deposition Compressive properties Compressive strength Finite element analysis Finite element method Fracture strength Inspection Ion bombardment Low pressure Membrane Membranes Residual stress Silicon nitride Thin films Weibull distribution
Online-Zugang:	Volltext
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