A simulation investigation on elliptical vibration cutting of single-crystal silicon

In recent years, elliptical vibration cutting (EVC) has been proven as a promising technique to improve the cutting performance of brittle materials like silicon. However, the influence of vibration parameters on the machined surface quality has not been explored clearly. In this paper, molecular dy...

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Veröffentlicht in:	International journal of advanced manufacturing technology 2020-06, Vol.108 (7-8), p.2231-2243
Hauptverfasser:	Liu, Changlin, Zhang, Jianguo, Zhang, Junjie, Chen, Xiao, Xiao, Junfeng, Xu, Jianfeng
Format:	Artikel
Sprache:	eng
Schlagworte:	Amplitudes Brittle materials CAE) and Design Compressive properties Computer-Aided Engineering (CAD Crystal pulling Engineering Industrial and Production Engineering Mechanical Engineering Media Management Molecular dynamics Original Article Parameters Phase transitions Silicon Simulation Single crystals Stress concentration Stress distribution Surface properties Tensile stress Vibration
Online-Zugang:	Volltext
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