Effects of AFM tip wear on evaluating the surface quality machined by ultra-precision machining process
In this paper, the influences of tip wear of atomic force microscope (AFM) on evaluating the surface quality were studied. Three typical ultra-precision machined surfaces respectively machined by ultra-precision grinding, ultra-precision turning, and ultra-precision polishing were chosen, and the si...
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| Veröffentlicht in: | International journal of advanced manufacturing technology 2019-12, Vol.105 (11), p.4663-4675 |
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| creator | Xue, Bo Geng, Yanquan Yan, Yongda Sun, Yazhou |
| description | In this paper, the influences of tip wear of atomic force microscope (AFM) on evaluating the surface quality were studied. Three typical ultra-precision machined surfaces respectively machined by ultra-precision grinding, ultra-precision turning, and ultra-precision polishing were chosen, and the silicon tips with different wear degrees, the new tip, the moderately worn tip, and the badly worn tip, were employed to scan these three surfaces. By analyzing the AFM scanning results from different tips, each type of surface was characterized with the methods of 3D surface texture parameters and power spectral density (PSD). It was found that the tip wear would mainly degrade the ability of tip on measuring the valley structure and cause more artifacts when measuring the peak structure, which resulted in the effects on evaluating surface roughness parameters and identifying the high-frequency harmonic components. Moreover, due to the different topography characteristics of these three ultra-precision machined surfaces, the influences caused by tip wear on the evaluation of the surface quality were reflected in different aspects. |
| doi_str_mv | 10.1007/s00170-019-03958-x |
| format | Article |
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Three typical ultra-precision machined surfaces respectively machined by ultra-precision grinding, ultra-precision turning, and ultra-precision polishing were chosen, and the silicon tips with different wear degrees, the new tip, the moderately worn tip, and the badly worn tip, were employed to scan these three surfaces. By analyzing the AFM scanning results from different tips, each type of surface was characterized with the methods of 3D surface texture parameters and power spectral density (PSD). It was found that the tip wear would mainly degrade the ability of tip on measuring the valley structure and cause more artifacts when measuring the peak structure, which resulted in the effects on evaluating surface roughness parameters and identifying the high-frequency harmonic components. Moreover, due to the different topography characteristics of these three ultra-precision machined surfaces, the influences caused by tip wear on the evaluation of the surface quality were reflected in different aspects.</description><identifier>ISSN: 0268-3768</identifier><identifier>EISSN: 1433-3015</identifier><identifier>DOI: 10.1007/s00170-019-03958-x</identifier><language>eng</language><publisher>London: Springer London</publisher><subject>Atomic force microscopes ; Atomic force microscopy ; CAE) and Design ; Computer-Aided Engineering (CAD ; Engineering ; Evaluation ; Industrial and Production Engineering ; Mechanical Engineering ; Media Management ; Microscopes ; Original Article ; Parameter identification ; Power spectral density ; Precision machining ; Surface layers ; Surface properties ; Surface roughness ; Tips ; Turning (machining) ; Wear</subject><ispartof>International journal of advanced manufacturing technology, 2019-12, Vol.105 (11), p.4663-4675</ispartof><rights>Springer-Verlag London Ltd., part of Springer Nature 2019</rights><rights>The International Journal of Advanced Manufacturing Technology is a copyright of Springer, (2019). All Rights Reserved.</rights><rights>Springer-Verlag London Ltd., part of Springer Nature 2019.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c347t-266ee5356272020fdccc585209e7b4b91b1a7c8e9a88615c9bf44bcb550c1da83</citedby><cites>FETCH-LOGICAL-c347t-266ee5356272020fdccc585209e7b4b91b1a7c8e9a88615c9bf44bcb550c1da83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s00170-019-03958-x$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s00170-019-03958-x$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Xue, Bo</creatorcontrib><creatorcontrib>Geng, Yanquan</creatorcontrib><creatorcontrib>Yan, Yongda</creatorcontrib><creatorcontrib>Sun, Yazhou</creatorcontrib><title>Effects of AFM tip wear on evaluating the surface quality machined by ultra-precision machining process</title><title>International journal of advanced manufacturing technology</title><addtitle>Int J Adv Manuf Technol</addtitle><description>In this paper, the influences of tip wear of atomic force microscope (AFM) on evaluating the surface quality were studied. Three typical ultra-precision machined surfaces respectively machined by ultra-precision grinding, ultra-precision turning, and ultra-precision polishing were chosen, and the silicon tips with different wear degrees, the new tip, the moderately worn tip, and the badly worn tip, were employed to scan these three surfaces. By analyzing the AFM scanning results from different tips, each type of surface was characterized with the methods of 3D surface texture parameters and power spectral density (PSD). It was found that the tip wear would mainly degrade the ability of tip on measuring the valley structure and cause more artifacts when measuring the peak structure, which resulted in the effects on evaluating surface roughness parameters and identifying the high-frequency harmonic components. Moreover, due to the different topography characteristics of these three ultra-precision machined surfaces, the influences caused by tip wear on the evaluation of the surface quality were reflected in different aspects.</description><subject>Atomic force microscopes</subject><subject>Atomic force microscopy</subject><subject>CAE) and Design</subject><subject>Computer-Aided Engineering (CAD</subject><subject>Engineering</subject><subject>Evaluation</subject><subject>Industrial and Production Engineering</subject><subject>Mechanical Engineering</subject><subject>Media Management</subject><subject>Microscopes</subject><subject>Original Article</subject><subject>Parameter identification</subject><subject>Power spectral density</subject><subject>Precision machining</subject><subject>Surface layers</subject><subject>Surface properties</subject><subject>Surface roughness</subject><subject>Tips</subject><subject>Turning (machining)</subject><subject>Wear</subject><issn>0268-3768</issn><issn>1433-3015</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><sourceid>AFKRA</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNp9kE1PAjEURRujiYj-AVdNXFf7Me20S0JATTBudN10SgtDhhloOwr_3uKYuGP1Fu-ce5MLwD3BjwTj8iliTEqMMFEIM8UlOlyAESkYQwwTfglGmAqJWCnkNbiJcZNxQYQcgdXMe2dThJ2Hk_kbTPUOfjsTYNdC92Wa3qS6XcG0djD2wRvr4L43TZ2OcGvsum7dElZH2DcpGLQLztaxzurwO5m70FkX4y248qaJ7u7vjsHnfPYxfUGL9-fX6WSBLCvKhKgQznHGBS0pptgvrbVccoqVK6uiUqQiprTSKSOlINyqyhdFZSvOsSVLI9kYPAy5uXffu5j0putDmys1LRSWQgilzlIslzEhGM8UHSgbuhiD83oX6q0JR02wPs2uh9l1nl3_zq4PWWKDFDPcrlz4jz5j_QDPLYXf</recordid><startdate>20191201</startdate><enddate>20191201</enddate><creator>Xue, Bo</creator><creator>Geng, Yanquan</creator><creator>Yan, Yongda</creator><creator>Sun, Yazhou</creator><general>Springer London</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>L6V</scope><scope>M7S</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20191201</creationdate><title>Effects of AFM tip wear on evaluating the surface quality machined by ultra-precision machining process</title><author>Xue, Bo ; Geng, Yanquan ; Yan, Yongda ; Sun, Yazhou</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c347t-266ee5356272020fdccc585209e7b4b91b1a7c8e9a88615c9bf44bcb550c1da83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>Atomic force microscopes</topic><topic>Atomic force microscopy</topic><topic>CAE) and Design</topic><topic>Computer-Aided Engineering (CAD</topic><topic>Engineering</topic><topic>Evaluation</topic><topic>Industrial and Production Engineering</topic><topic>Mechanical Engineering</topic><topic>Media Management</topic><topic>Microscopes</topic><topic>Original Article</topic><topic>Parameter identification</topic><topic>Power spectral density</topic><topic>Precision machining</topic><topic>Surface layers</topic><topic>Surface properties</topic><topic>Surface roughness</topic><topic>Tips</topic><topic>Turning (machining)</topic><topic>Wear</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Xue, Bo</creatorcontrib><creatorcontrib>Geng, Yanquan</creatorcontrib><creatorcontrib>Yan, Yongda</creatorcontrib><creatorcontrib>Sun, Yazhou</creatorcontrib><collection>CrossRef</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><jtitle>International journal of advanced manufacturing technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Xue, Bo</au><au>Geng, Yanquan</au><au>Yan, Yongda</au><au>Sun, Yazhou</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of AFM tip wear on evaluating the surface quality machined by ultra-precision machining process</atitle><jtitle>International journal of advanced manufacturing technology</jtitle><stitle>Int J Adv Manuf Technol</stitle><date>2019-12-01</date><risdate>2019</risdate><volume>105</volume><issue>11</issue><spage>4663</spage><epage>4675</epage><pages>4663-4675</pages><issn>0268-3768</issn><eissn>1433-3015</eissn><abstract>In this paper, the influences of tip wear of atomic force microscope (AFM) on evaluating the surface quality were studied. Three typical ultra-precision machined surfaces respectively machined by ultra-precision grinding, ultra-precision turning, and ultra-precision polishing were chosen, and the silicon tips with different wear degrees, the new tip, the moderately worn tip, and the badly worn tip, were employed to scan these three surfaces. By analyzing the AFM scanning results from different tips, each type of surface was characterized with the methods of 3D surface texture parameters and power spectral density (PSD). It was found that the tip wear would mainly degrade the ability of tip on measuring the valley structure and cause more artifacts when measuring the peak structure, which resulted in the effects on evaluating surface roughness parameters and identifying the high-frequency harmonic components. Moreover, due to the different topography characteristics of these three ultra-precision machined surfaces, the influences caused by tip wear on the evaluation of the surface quality were reflected in different aspects.</abstract><cop>London</cop><pub>Springer London</pub><doi>10.1007/s00170-019-03958-x</doi><tpages>13</tpages></addata></record> |
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| subjects | Atomic force microscopes Atomic force microscopy CAE) and Design Computer-Aided Engineering (CAD Engineering Evaluation Industrial and Production Engineering Mechanical Engineering Media Management Microscopes Original Article Parameter identification Power spectral density Precision machining Surface layers Surface properties Surface roughness Tips Turning (machining) Wear |
| title | Effects of AFM tip wear on evaluating the surface quality machined by ultra-precision machining process |
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