Microstructure, mechanical, and tribological properties of hydrogenated amorphous carbon film deposited on Ti6Al4V alloy under different substrate bias voltage

The aim of this work is to find how substrate bias affect the microstructure, mechanical, and tribological properties of the a-C/H films deposited on Ti6Al4V by magnetron sputtering. In order to attain this purpose, the structure of the deposited a-C/H film was investigated by scanning electron micr...

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Veröffentlicht in:International journal of advanced manufacturing technology 2018-02, Vol.94 (5-8), p.2491-2497
Hauptverfasser: Huang, Weijiu, Ma, Jianjun, Wang, Junjun, Wang, Linqing, Tian, Zhongqing
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Sprache:eng
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