Effect of nitrogen pressure and substrate bias voltage on the properties of Al–Cr–B–N coatings deposited using cathodic arc evaporation
Cathodic arc evaporation deposition method was applied to forming Al–Cr–B–N coatings. The effect of nitrogen pressure (pN2) and substrate bias voltage (UB) on the properties of the coatings synthesized using Al50Cr30Br20 cathode was investigated. The chemical and phase composition of the coatings, t...
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Veröffentlicht in: | Tribology international 2021-02, Vol.154, p.106744, Article 106744 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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