Effective silicon production from SiCl4 source using hydrogen radicals generated and transported at atmospheric pressure

In the Siemens method, high-purity Si is produced by reducing SiHCl 3 source gas with H 2 ambient under atmospheric pressure. Since the pyrolysis of SiHCl 3 , which produces SiCl 4 as a byproduct, occurs dominantly in the practical Siemens process, the Si yield is low (~30%). In the present study, w...

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