Optical Grating Techniques for MEMS-Based Spectrometer-A Review

This paper examined the innovations of the spectrometers for the measurement of consistency based parameters of the handheld Micro Electronic Mechanical System (MEMS) Spectrometer. Fast, highly sensitive, miniature spectroscopy techniques empowered quick, savvy and effective measures for various app...

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Veröffentlicht in:	IEEE sensors journal 2021-03, Vol.21 (5), p.5645-5655
Hauptverfasser:	Ravindran, Ajith, Nirmal, D., Prajoon, P., Rani, D. Gracia Nirmala
Format:	Artikel
Sprache:	eng
Schlagworte:	Chromium Diffraction Diffraction gratings diffraction order Dispersion Efficiency Gratings Gratings (spectra) groove density Grooves Mechanical systems MEMS Microelectromechanical systems Micromechanical devices optical grating Optical sensors Parameter identification Performance evaluation Polymethyl methacrylate Resolution Silica glass Silicon dioxide Silicon nitride spectral range Spectrometers Spectroscopy Spectrum analysis system resolution transmission gratings
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