Displacement amplification and differential actuation in piezo driven nanopositioners

[Display omitted] •Amplifies displacements of PZT stacks by a factor of 12 along horizontal axes.•Amplified output displacement is bilateral in differential actuation (DA) mode.•Output travel range is doubled w.r.t. to non-differential actuation modes.•DA improves linearity of input-voltage-output-d...

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Veröffentlicht in:	Mechanical systems and signal processing 2021-04, Vol.151, p.107356, Article 107356
Hauptverfasser:	Bazaei, Ali, Ettefagh, Massoud Hemmasian, Chen, Zhiyong
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Amplification Differential actuation Displacement Displacement amplification Flexing Flexure-based nanopositioner Housing Piezoelectric actuator Sensors Stacks Wiring
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