Effects of titanium doping on the structure and mechanical properties of diamond-like nanocomposite films

In this paper, we report on comparative studies of mechanical properties of diamond-like nanocomposite (DLN) a-C:H:Si:O films and titanium-doped DLN films, which were focused on (i) nanoindentation and internal stress examination of DLN films of different thickness (up to 10 μm) and (ii) structural...

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Veröffentlicht in:	Surface & coatings technology 2020-11, Vol.402, p.126300, Article 126300
Hauptverfasser:	Pimenov, S.M., Zavedeev, E.V., Arutyunyan, N.R., Zilova, O.S., Barinov, A.D., Presniakov, M.Yu, Shupegin, M.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon content Comparative studies Compressive properties Diamond films Diamond-like nanocomposite (DLN) films Diamonds Elastic recovery Hardness Mechanical properties Modulus of elasticity Nanocomposites Nanocrystals Nanoindentation Raman spectra Raman spectroscopy Residual stress Spectrum analysis Thickness Ti doping TiC nanocrystals Titanium Titanium carbide Transmission electron microscopy
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