Structural and Spectroscopic Studies of Epitaxial GaAs Layers Grown on Compliant Substrates Based on a Superstructure Layer and Protoporous Silicon

The purpose of the study is to investigate the effect of a new type of compliant substrate based on an AlGaAs superstructure layer (SL) and a protoporous Si (proto-Si) layer formed on a crystal Si ( c -Si) layer on the practical implementation and specific features of the epitaxial growth of GaAs layers by metal–organic chemical vapor deposition. It is for the first time shown that the low-temperature growth of high-crystal-quality epitaxial GaAs films can be implemented due to the use of compliant SL/proto-Si substrates. The introduction of a SL into the composition of a compliant substrate in addition to proto-Si makes it possible to neutralize a number of negative effects of low-temperature growth, to reduce the level of stresses in the epitaxial layer, to protect it from self-doping with Si atoms, to reduce the number of technological operations of the growth of transition buffer layers, and to improve the structural and morphological characteristics of the epitaxial layer.