Design and Development of the MEMS-Based High-g Acceleration Threshold Switch
The paper describes the design, simulation and fabrication of a micro-electromechanical system (MEMS) based acceleration threshold switch with an independent angled latching mechanism. The switch is designed to operate in critical applications wherein power cannot be applied. It is a passive device...
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Veröffentlicht in: | Journal of microelectromechanical systems 2021-02, Vol.30 (1), p.24-31 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The paper describes the design, simulation and fabrication of a micro-electromechanical system (MEMS) based acceleration threshold switch with an independent angled latching mechanism. The switch is designed to operate in critical applications wherein power cannot be applied. It is a passive device that does not require power for retention of its mechanical state and mechanical memory. The switch consists of a serpentine spring-mass system with an independent angled latching mechanism and multiple contacts. Stoppers were used to limit displacement in the lateral direction and provide a guided path in the line of action to the proof mass. A transient analysis was performed to study non-linear behaviour of the switch. The latching threshold value was determined analytically based on the geometry of the switch. The switch was fabricated on an SOI (silicon-on-insulator) wafer having 25\mu \text{m} thick device layer and 400\mu \text{m} handle wafer. The switch was given a static mechanical shock of 3500g to observe its behaviour under shock. Contact resistance of the switch was approximately 2\Omega in the ON position and more than 100 \text{M}\Omega in OFF position. The theoretical and simulated results were in good agreement with the experimental results. [2020-0268] |
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ISSN: | 1057-7157 1941-0158 |
DOI: | 10.1109/JMEMS.2020.3032833 |