Sputter-Grown Pd-Capped CuO Thin Films for a Highly Sensitive and Selective Hydrogen Gas Sensor
In the present work, hydrogen gas sensing properties of palladium-capped copper oxide (Pd/CuO) thin films have been investigated. The Pd/CuO thin films were deposited on glass substrate for different deposition times (10–30 min) using direct current magnetron sputtering. The Pd/CuO thin films were c...
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| Veröffentlicht in: | Journal of electronic materials 2021, Vol.50 (1), p.192-200 |
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| creator | Yadav, Prashant Kumar, Ashwani Sanger, Amit Gautam, Yogendra K. Singh, Beer Pal |
| description | In the present work, hydrogen gas sensing properties of palladium-capped copper oxide (Pd/CuO) thin films have been investigated. The Pd/CuO thin films were deposited on glass substrate for different deposition times (10–30 min) using direct current magnetron sputtering. The Pd/CuO thin films were characterized by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy and x-ray photoelectron spectroscopy for their structural, morphological and compositional properties, respectively. The Pd/CuO thin film sensor deposited for 10 min presents a remarkable sensing performance with fast response/recovery time of 10 s/50 s for hydrogen gas at a concentration of (1000 ppm) and optimum operating temperature of 300°C. The sensor is observed to be highly selective towards hydrogen (H
2
) gas compared to the other gases such as carbon monoxide (CO) and ammonia (NH
3
). The sensor is stable under high humidity conditions (60% RH). The studied Pd/CuO thin film sensor can be used to design a simple and low-cost sensor to detect low concentrations of H
2
gas for use in hydrogen-driven industries. |
| doi_str_mv | 10.1007/s11664-020-08588-8 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2473255988</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2473255988</sourcerecordid><originalsourceid>FETCH-LOGICAL-c356t-ca379c18e02da2f94598f4db1895ce5d280975393b57827347c1fd578ed075c33</originalsourceid><addsrcrecordid>eNp9kF1LwzAUhoMoOKd_wKuA19F8NE16KcVtwmDCJngXsiTdOrq2Jq3Sf2-2Ct55dc6B530PPADcE_xIMBZPgZA0TRCmGGHJpUTyAkwITxgiMv24BBPMUoI4Zfwa3IRwwJhwIskEqHXbd53zaO6b7xq-WZTrtnUW5v0KbvZlDWdldQywaDzUcFHu9tUA164OZVd-OahrG6_KmfO1GKxvdq6Gcx3OUONvwVWhq-DufucUvM9eNvkCLVfz1_x5iQzjaYeMZiIzRDpMraZFlvBMFondEplx47ilEmeCs4xtuZBUsEQYUti4O4sFN4xNwcPY2_rms3ehU4em93V8qWgiGOWxUEaKjpTxTQjeFar15VH7QRGsTiLVKFJFkeosUp1CbAyFCNc75_-q_0n9AD6TdLU</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2473255988</pqid></control><display><type>article</type><title>Sputter-Grown Pd-Capped CuO Thin Films for a Highly Sensitive and Selective Hydrogen Gas Sensor</title><source>Springer Nature - Complete Springer Journals</source><creator>Yadav, Prashant ; Kumar, Ashwani ; Sanger, Amit ; Gautam, Yogendra K. ; Singh, Beer Pal</creator><creatorcontrib>Yadav, Prashant ; Kumar, Ashwani ; Sanger, Amit ; Gautam, Yogendra K. ; Singh, Beer Pal</creatorcontrib><description>In the present work, hydrogen gas sensing properties of palladium-capped copper oxide (Pd/CuO) thin films have been investigated. The Pd/CuO thin films were deposited on glass substrate for different deposition times (10–30 min) using direct current magnetron sputtering. The Pd/CuO thin films were characterized by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy and x-ray photoelectron spectroscopy for their structural, morphological and compositional properties, respectively. The Pd/CuO thin film sensor deposited for 10 min presents a remarkable sensing performance with fast response/recovery time of 10 s/50 s for hydrogen gas at a concentration of (1000 ppm) and optimum operating temperature of 300°C. The sensor is observed to be highly selective towards hydrogen (H
2
) gas compared to the other gases such as carbon monoxide (CO) and ammonia (NH
3
). The sensor is stable under high humidity conditions (60% RH). The studied Pd/CuO thin film sensor can be used to design a simple and low-cost sensor to detect low concentrations of H
2
gas for use in hydrogen-driven industries.</description><identifier>ISSN: 0361-5235</identifier><identifier>EISSN: 1543-186X</identifier><identifier>DOI: 10.1007/s11664-020-08588-8</identifier><language>eng</language><publisher>New York: Springer US</publisher><subject>Ammonia ; Atomic force microscopy ; Characterization and Evaluation of Materials ; Chemistry and Materials Science ; Copper oxides ; Direct current ; Electronics and Microelectronics ; Field emission microscopy ; Gas sensors ; Gases ; Glass substrates ; Hydrogen ; Instrumentation ; Low concentrations ; Magnetron sputtering ; Materials Science ; Microscopy ; Operating temperature ; Optical and Electronic Materials ; Original Research Article ; Palladium ; Photoelectrons ; Recovery time ; Sensors ; Solid State Physics ; Thin films</subject><ispartof>Journal of electronic materials, 2021, Vol.50 (1), p.192-200</ispartof><rights>The Minerals, Metals & Materials Society 2020</rights><rights>The Minerals, Metals & Materials Society 2020.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c356t-ca379c18e02da2f94598f4db1895ce5d280975393b57827347c1fd578ed075c33</citedby><cites>FETCH-LOGICAL-c356t-ca379c18e02da2f94598f4db1895ce5d280975393b57827347c1fd578ed075c33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s11664-020-08588-8$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s11664-020-08588-8$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27901,27902,41464,42533,51294</link.rule.ids></links><search><creatorcontrib>Yadav, Prashant</creatorcontrib><creatorcontrib>Kumar, Ashwani</creatorcontrib><creatorcontrib>Sanger, Amit</creatorcontrib><creatorcontrib>Gautam, Yogendra K.</creatorcontrib><creatorcontrib>Singh, Beer Pal</creatorcontrib><title>Sputter-Grown Pd-Capped CuO Thin Films for a Highly Sensitive and Selective Hydrogen Gas Sensor</title><title>Journal of electronic materials</title><addtitle>Journal of Elec Materi</addtitle><description>In the present work, hydrogen gas sensing properties of palladium-capped copper oxide (Pd/CuO) thin films have been investigated. The Pd/CuO thin films were deposited on glass substrate for different deposition times (10–30 min) using direct current magnetron sputtering. The Pd/CuO thin films were characterized by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy and x-ray photoelectron spectroscopy for their structural, morphological and compositional properties, respectively. The Pd/CuO thin film sensor deposited for 10 min presents a remarkable sensing performance with fast response/recovery time of 10 s/50 s for hydrogen gas at a concentration of (1000 ppm) and optimum operating temperature of 300°C. The sensor is observed to be highly selective towards hydrogen (H
2
) gas compared to the other gases such as carbon monoxide (CO) and ammonia (NH
3
). The sensor is stable under high humidity conditions (60% RH). The studied Pd/CuO thin film sensor can be used to design a simple and low-cost sensor to detect low concentrations of H
2
gas for use in hydrogen-driven industries.</description><subject>Ammonia</subject><subject>Atomic force microscopy</subject><subject>Characterization and Evaluation of Materials</subject><subject>Chemistry and Materials Science</subject><subject>Copper oxides</subject><subject>Direct current</subject><subject>Electronics and Microelectronics</subject><subject>Field emission microscopy</subject><subject>Gas sensors</subject><subject>Gases</subject><subject>Glass substrates</subject><subject>Hydrogen</subject><subject>Instrumentation</subject><subject>Low concentrations</subject><subject>Magnetron sputtering</subject><subject>Materials Science</subject><subject>Microscopy</subject><subject>Operating temperature</subject><subject>Optical and Electronic Materials</subject><subject>Original Research Article</subject><subject>Palladium</subject><subject>Photoelectrons</subject><subject>Recovery time</subject><subject>Sensors</subject><subject>Solid State Physics</subject><subject>Thin films</subject><issn>0361-5235</issn><issn>1543-186X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><sourceid>8G5</sourceid><sourceid>BENPR</sourceid><sourceid>GUQSH</sourceid><sourceid>M2O</sourceid><recordid>eNp9kF1LwzAUhoMoOKd_wKuA19F8NE16KcVtwmDCJngXsiTdOrq2Jq3Sf2-2Ct55dc6B530PPADcE_xIMBZPgZA0TRCmGGHJpUTyAkwITxgiMv24BBPMUoI4Zfwa3IRwwJhwIskEqHXbd53zaO6b7xq-WZTrtnUW5v0KbvZlDWdldQywaDzUcFHu9tUA164OZVd-OahrG6_KmfO1GKxvdq6Gcx3OUONvwVWhq-DufucUvM9eNvkCLVfz1_x5iQzjaYeMZiIzRDpMraZFlvBMFondEplx47ilEmeCs4xtuZBUsEQYUti4O4sFN4xNwcPY2_rms3ehU4em93V8qWgiGOWxUEaKjpTxTQjeFar15VH7QRGsTiLVKFJFkeosUp1CbAyFCNc75_-q_0n9AD6TdLU</recordid><startdate>2021</startdate><enddate>2021</enddate><creator>Yadav, Prashant</creator><creator>Kumar, Ashwani</creator><creator>Sanger, Amit</creator><creator>Gautam, Yogendra K.</creator><creator>Singh, Beer Pal</creator><general>Springer US</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>3V.</scope><scope>7XB</scope><scope>88I</scope><scope>8AF</scope><scope>8AO</scope><scope>8FE</scope><scope>8FG</scope><scope>8FK</scope><scope>8G5</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>GNUQQ</scope><scope>GUQSH</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M2O</scope><scope>M2P</scope><scope>M7S</scope><scope>MBDVC</scope><scope>P5Z</scope><scope>P62</scope><scope>PDBOC</scope><scope>PHGZM</scope><scope>PHGZT</scope><scope>PKEHL</scope><scope>PQEST</scope><scope>PQGLB</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope><scope>Q9U</scope><scope>S0X</scope></search><sort><creationdate>2021</creationdate><title>Sputter-Grown Pd-Capped CuO Thin Films for a Highly Sensitive and Selective Hydrogen Gas Sensor</title><author>Yadav, Prashant ; Kumar, Ashwani ; Sanger, Amit ; Gautam, Yogendra K. ; Singh, Beer Pal</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c356t-ca379c18e02da2f94598f4db1895ce5d280975393b57827347c1fd578ed075c33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Ammonia</topic><topic>Atomic force microscopy</topic><topic>Characterization and Evaluation of Materials</topic><topic>Chemistry and Materials Science</topic><topic>Copper oxides</topic><topic>Direct current</topic><topic>Electronics and Microelectronics</topic><topic>Field emission microscopy</topic><topic>Gas sensors</topic><topic>Gases</topic><topic>Glass substrates</topic><topic>Hydrogen</topic><topic>Instrumentation</topic><topic>Low concentrations</topic><topic>Magnetron sputtering</topic><topic>Materials Science</topic><topic>Microscopy</topic><topic>Operating temperature</topic><topic>Optical and Electronic Materials</topic><topic>Original Research Article</topic><topic>Palladium</topic><topic>Photoelectrons</topic><topic>Recovery time</topic><topic>Sensors</topic><topic>Solid State Physics</topic><topic>Thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yadav, Prashant</creatorcontrib><creatorcontrib>Kumar, Ashwani</creatorcontrib><creatorcontrib>Sanger, Amit</creatorcontrib><creatorcontrib>Gautam, Yogendra K.</creatorcontrib><creatorcontrib>Singh, Beer Pal</creatorcontrib><collection>CrossRef</collection><collection>ProQuest Central (Corporate)</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>Science Database (Alumni Edition)</collection><collection>STEM Database</collection><collection>ProQuest Pharma Collection</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>Research Library (Alumni Edition)</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies & Aerospace Collection</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>ProQuest Central Student</collection><collection>Research Library Prep</collection><collection>SciTech Premium Collection</collection><collection>Materials Science Database</collection><collection>ProQuest Engineering Collection</collection><collection>Research Library</collection><collection>Science Database</collection><collection>Engineering Database</collection><collection>Research Library (Corporate)</collection><collection>Advanced Technologies & Aerospace Database</collection><collection>ProQuest Advanced Technologies & Aerospace Collection</collection><collection>Materials Science Collection</collection><collection>ProQuest Central (New)</collection><collection>ProQuest One Academic (New)</collection><collection>ProQuest One Academic Middle East (New)</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Applied & Life Sciences</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><collection>ProQuest Central Basic</collection><collection>SIRS Editorial</collection><jtitle>Journal of electronic materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yadav, Prashant</au><au>Kumar, Ashwani</au><au>Sanger, Amit</au><au>Gautam, Yogendra K.</au><au>Singh, Beer Pal</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Sputter-Grown Pd-Capped CuO Thin Films for a Highly Sensitive and Selective Hydrogen Gas Sensor</atitle><jtitle>Journal of electronic materials</jtitle><stitle>Journal of Elec Materi</stitle><date>2021</date><risdate>2021</risdate><volume>50</volume><issue>1</issue><spage>192</spage><epage>200</epage><pages>192-200</pages><issn>0361-5235</issn><eissn>1543-186X</eissn><abstract>In the present work, hydrogen gas sensing properties of palladium-capped copper oxide (Pd/CuO) thin films have been investigated. The Pd/CuO thin films were deposited on glass substrate for different deposition times (10–30 min) using direct current magnetron sputtering. The Pd/CuO thin films were characterized by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy and x-ray photoelectron spectroscopy for their structural, morphological and compositional properties, respectively. The Pd/CuO thin film sensor deposited for 10 min presents a remarkable sensing performance with fast response/recovery time of 10 s/50 s for hydrogen gas at a concentration of (1000 ppm) and optimum operating temperature of 300°C. The sensor is observed to be highly selective towards hydrogen (H
2
) gas compared to the other gases such as carbon monoxide (CO) and ammonia (NH
3
). The sensor is stable under high humidity conditions (60% RH). The studied Pd/CuO thin film sensor can be used to design a simple and low-cost sensor to detect low concentrations of H
2
gas for use in hydrogen-driven industries.</abstract><cop>New York</cop><pub>Springer US</pub><doi>10.1007/s11664-020-08588-8</doi><tpages>9</tpages></addata></record> |
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| subjects | Ammonia Atomic force microscopy Characterization and Evaluation of Materials Chemistry and Materials Science Copper oxides Direct current Electronics and Microelectronics Field emission microscopy Gas sensors Gases Glass substrates Hydrogen Instrumentation Low concentrations Magnetron sputtering Materials Science Microscopy Operating temperature Optical and Electronic Materials Original Research Article Palladium Photoelectrons Recovery time Sensors Solid State Physics Thin films |
| title | Sputter-Grown Pd-Capped CuO Thin Films for a Highly Sensitive and Selective Hydrogen Gas Sensor |
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