Orientation Compensation of an Inchworm Stage with Optical Navigation

The orientation compensation of a three-degrees-of-freedom inchworm stage with optical navigation is described. As the stage does not use any guide or preload, a closed loop feedback control system is employed to retain the accurate orientation of the stage. The stage consists of piezoelectric actua...

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Veröffentlicht in:	International journal of automation technology 2018-09, Vol.12 (5), p.784-790
Hauptverfasser:	Torii, Akihiro, Mitsuyoshi, Yuta, Mototani, Suguru, Doki, Kae
Format:	Artikel
Sprache:	eng
Schlagworte:	Closed loops Compensation Deformation Electromagnetic forces Electromagnets Error reduction Feedback control Friction reduction Light sources Navigation Orientation Piezoelectric actuators
Online-Zugang:	Volltext
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