Deposition of diamond films on Si by microwave plasma CVD in varied CH4-H2 mixtures: Reverse nanocrystalline-to-microcrystalline structure transition at very high methane concentrations

Microcrystalline diamond (MCD) and nanocrystalline diamond (NCD) films were synthesized on Si substrates by a microwave plasma chemical vapor deposition in methane-hydrogen gas mixtures with a wide range of methane concentrations of 0.5–40%. The samples were investigated with scanning electron micro...

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Veröffentlicht in:	Diamond and related materials 2020-11, Vol.109, p.108072, Article 108072
Hauptverfasser:	Sedov, V.S., Martyanov, A.K., Khomich, A.A., Savin, S.S., Zavedeev, E.V., Ralchenko, V.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Chemical vapor deposition CVD synthesis Diamond films Diamond machining Diamond tools Gas mixtures Grain size Methane Microscopy Microwave plasma Microwave plasmas Nanocrystalline films Nanocrystals Polycrystalline diamond Protective coatings Raman spectra Raman spectroscopy Roughness Silicon substrates Spectrum analysis
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