Effect of chromium doping on high temperature tribological properties of silicon-doped diamond-like carbon films

Amorphous carbon films were deposited by means of closed-field unbalanced magnetron sputtering (CFUBMS). The silicon content was fixed at 1.3 at. %, while the chromium content was increased by modification of the current applied to the chromium magnetrons, with two doping levels, 0.3 and 2.7 at. %....

Ausführliche Beschreibung