A new test specimen for the determination of the field of view of small‐area X‐ray photoelectron spectrometers

Small‐area/spot photoelectron spectroscopy (SAXPS) is a powerful tool for the investigation of small surface features like microstructures of electronic devices, sensors or other functional surfaces, and so forth. For evaluating the quality of such microstructures, it is often crucial to know whethe...

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Veröffentlicht in:	Surface and interface analysis 2020-12, Vol.52 (12), p.890-894
Hauptverfasser:	Stockmann, Jörg M., Radnik, Jörg, Bütefisch, Sebastian, Busch, Ingo, Weimann, Thomas, Passiu, Cristiana, Rossi, Antonella, Unger, Wolfgang E.S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical analysis Electronic devices Evaluation Field of view Impact analysis Parameters Photoelectrons reference material selected area XPS Silicon substrates Silicon wafers small‐area XPS small‐spot XPS Spectrometers
Online-Zugang:	Volltext
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