The state of coating–substrate interfacial region formed during TiO2 coating deposition by Gas Injection Magnetron Sputtering technique

This manuscript presents the nature of interaction of energetic plasmoids, generated in the Gas Injection Magnetron Sputtering (GIMS) technique, with the surface of substrate or the coating–substrate system. We expected that the plasma generated by a dynamic injection of gas (GIMS) is better ionized...

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Veröffentlicht in:	Surface & coatings technology 2020-09, Vol.398, p.126092, Article 126092
Hauptverfasser:	Chodun, Rafal, Nowakowska-Langier, Katarzyna, Wicher, Bartosz, Okrasa, Sebastian, Kwiatkowski, Roch, Zaloga, Dobromil, Dypa, Marlena, Zdunek, Krzysztof
Format:	Artikel
Sprache:	eng
Schlagworte:	Amplitudes Anatase Coating-substrate interface Crystallization Deposition Emission analysis Gas injection HRTEM Kinetic energy Magnetron sputtering Nucleation OES Optical emission spectroscopy Plasma Plasmas (physics) Pressure oscillations Raman spectroscopy Spectrum analysis Substrates Titanium dioxide
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