Deposition and characterization of molybdenum oxide (MoO3) nanoparticles incorporated diamond-like carbon coatings using pulsed-DC PECVD

[Display omitted] •Incorporation of MoO3 nanoparticles into DLC using pulsed-DC PECVD.•The presence of Mo2C improved the adhesion property of the DLC-Mo thin film.•Rockwell C indentation test for DLC-Mo was classified as HF1 according to VDI 3198.•The minimum and maximum COF is 0.075 and 0.22 respec...

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Veröffentlicht in:	Materials letters 2020-11, Vol.278, p.128420, Article 128420
Hauptverfasser:	Kolawole, Funsho Olaitan, Ramirez, Marco Antonio, Kolawole, Shola Kolade, Varela, Luis Bernardo, Tschiptschin, André Paulo
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Carbon materials Deposition Diamond-like carbon films Electron microscopes Hardness measurement Materials science Modulus of elasticity Molybdenum Molybdenum oxides Molybdenum trioxide MoO3 nanoparticles Nanohardness Nanoparticles Plasma enhanced chemical vapor deposition Raman spectroscopy Scratch tests Spectrum analysis Substrates Thickness measurement Thin film Thin films X-ray diffraction
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