Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like structures from plasma state of CO2 gas

The Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like vertical structures from the plasma state of CO2 gas on various catalyst-free substrates is experimentally studied. A peculiarity of the synthesis conditions is the ability to control a plasma density in the synthesis region to...

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Veröffentlicht in:	Carbon (New York) 2020-10, Vol.167, p.132-139
Hauptverfasser:	Svavil’nyi, M.Ye, Panarin, V.Ye, Shkola, A.A., Nikolenko, A.S., Strelchuk, V.V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aromatic compounds Carbon dioxide Chemical synthesis Chemical vapor deposition Graphene Nucleation Plasma density Plasma enhanced chemical vapor deposition Plasma physics Stability Substrates
Online-Zugang:	Volltext
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