Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like structures from plasma state of CO2 gas
The Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like vertical structures from the plasma state of CO2 gas on various catalyst-free substrates is experimentally studied. A peculiarity of the synthesis conditions is the ability to control a plasma density in the synthesis region to...
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| Veröffentlicht in: | Carbon (New York) 2020-10, Vol.167, p.132-139 |
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| container_title | Carbon (New York) |
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| creator | Svavil’nyi, M.Ye Panarin, V.Ye Shkola, A.A. Nikolenko, A.S. Strelchuk, V.V. |
| description | The Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like vertical structures from the plasma state of CO2 gas on various catalyst-free substrates is experimentally studied. A peculiarity of the synthesis conditions is the ability to control a plasma density in the synthesis region to very low values. The physical processes taking place on substrates, as well as models for the nucleation of primary aromatic rings and further growth of the formed graphene structures are considered.
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| doi_str_mv | 10.1016/j.carbon.2020.05.057 |
| format | Article |
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| ispartof | Carbon (New York), 2020-10, Vol.167, p.132-139 |
| issn | 0008-6223 1873-3891 |
| language | eng |
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| source | Access via ScienceDirect (Elsevier) |
| subjects | Aromatic compounds Carbon dioxide Chemical synthesis Chemical vapor deposition Graphene Nucleation Plasma density Plasma enhanced chemical vapor deposition Plasma physics Stability Substrates |
| title | Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like structures from plasma state of CO2 gas |
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