Radio-frequency sputtering fabrication of chalcogenide-based Er3+-doped vertical optical cavities for near-infrared operation

Chalcogenide-oxide Bragg reflectors and a 1-D vertical cavity for operation at 1.55 gm were designed and fabricated via radio-frequency sputtering. The Bragg reflectors were made out of repeating layers of Al2O3 and As2Se3, and the cavity was obtained via a Ga5Ge20Sb10S65:Er3+ defect layer. The laye...

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