Optimization of anodizing process of tantalum for Ta2O5-based capacitors

Anodic oxides were grown to 50 V on Ta in several organic ions containing anodizing baths. Their properties were compared with anodic Ta oxide film grown to the same formation voltage in 0.1 M NaOH. Anodizing process carried out in sodium citrate led to the growth of the anodic oxide with the best b...

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Veröffentlicht in:Journal of solid state electrochemistry 2020-11, Vol.24 (11-12), p.2953-2962
Hauptverfasser: Zaffora, Andrea, Di Franco, Francesco, Di Quarto, Francesco, Santamaria, Monica
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Sprache:eng
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