Optimization of anodizing process of tantalum for Ta2O5-based capacitors
Anodic oxides were grown to 50 V on Ta in several organic ions containing anodizing baths. Their properties were compared with anodic Ta oxide film grown to the same formation voltage in 0.1 M NaOH. Anodizing process carried out in sodium citrate led to the growth of the anodic oxide with the best b...
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Veröffentlicht in: | Journal of solid state electrochemistry 2020-11, Vol.24 (11-12), p.2953-2962 |
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Sprache: | eng |
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