Study on Estimation Method for Maximum Temperature of Multi-layered Micro-probe by Joule-Heating

In this study, a method which would improve reliability of coated vertical type micro-probe under Joule heating is described. The method is to decouple the mechanical and electrical characteristics of a probe. That is, the method is to coat a metal with good electrical characteristics on a core meta...

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Veröffentlicht in:	International journal of precision engineering and manufacturing 2020-10, Vol.21 (10), p.1955-1964
Hauptverfasser:	Jung, Hyun-Woo, Kim, Yun-Jae, Park, Jun-Hyub
Format:	Artikel
Sprache:	eng
Schlagworte:	Coating Cross-sections Electrical resistivity Electroplating Engineering Gold Industrial and Production Engineering Materials Science Mechanical properties Multilayers Nickel Ohmic dissipation Regular Paper Resistance heating Thickness
Online-Zugang:	Volltext
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