Microstructure and plasma corrosion behavior of yttria coatings prepared by the aerosol deposition method

Particle contamination arising from inner ceramic components of the plasma etching equipment has become a serious issue. Yttria (Y2O3) coatings prepared via aerosol deposition (AD) have demonstrated superior plasma resistance in the reduction of particle contamination. The superior particle contamin...

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Veröffentlicht in:	Journal of the American Ceramic Society 2020-12, Vol.103 (12), p.7031-7040
Hauptverfasser:	Ashizawa, Hiroaki, Masakatsu, Kiyohara, Yoshida, Katsumi
Format:	Artikel
Sprache:	eng
Schlagworte:	aerosol deposition Coatings Contamination Corrosion Corrosion resistance Deposition Dew Etching equipment Microstructure Plasma etching Porosity Surface roughness yttrium compounds Yttrium oxide
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