AlScN-based MEMS magnetoelectric sensor

MEMS sensors based on magnetoelectric composites have attracted great interest due to their capability to detect weak magnetic fields, showing high potential in applications like biomagnetic field detection and magnetic particle imaging. This paper reports on a scandium aluminum nitride thin film-ba...

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Veröffentlicht in:	Applied physics letters 2020-09, Vol.117 (13), Article 132903
Hauptverfasser:	Su, Jingxiang, Niekiel, Florian, Fichtner, Simon, Thormaehlen, Lars, Kirchhof, Christine, Meyners, Dirk, Quandt, Eckhard, Wagner, Bernhard, Lofink, Fabian
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Aluminum nitride Applied physics Electric potential Electronic systems Magnetostriction Microelectromechanical systems Photovoltaic cells Physical Sciences Physics Physics, Applied Piezoelectricity Polysilicon Resonance Scandium Science & Technology Sensors Thin films Voltage
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