Study of graphene layer growth on dielectric substrate in microwave plasma torch at atmospheric pressure

The initial stage of graphene layer deposition on silicon oxide substrate by ethanol decomposition in dual-channel microwave plasma torch at atmospheric pressure was studied in dependence on precursor flow rate and delivered microwave power. Depending on ethanol flow rate and substrate temperature,...

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Veröffentlicht in:	Diamond and related materials 2020-05, Vol.105, p.107798, Article 107798
Hauptverfasser:	Jašek, Ondřej, Toman, Jozef, Jurmanová, Jana, Šnírer, Miroslav, Kudrle, Vít, Buršíková, Vilma
Format:	Artikel
Sprache:	eng
Schlagworte:	Atmospheric pressure Carbon Density Deposition Dielectric substrate Emission analysis Ethanol Flow velocity G ratio Graphene Microwave plasma Microwave plasmas Nanoparticles Nanostructure Optical emission spectroscopy Photoelectrons Plasma diagnostics Pressure dependence Raman spectra Raman spectroscopy Sheets Silicon oxides Silicon substrates Spectroscopic analysis Spectrum analysis X ray photoelectron spectroscopy
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