Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture
•The variation of the craters generated by fs laser irradiation with repetition rate is investigated.•The influence of the laser pulse repetition rate on removal rate and surface texture on silicon is addressed.•Possible effects of plume shielding on crater features and laser surface structuring at...
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| Veröffentlicht in: | Optics and laser technology 2020-06, Vol.126, p.106073, Article 106073 |
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| container_title | Optics and laser technology |
| container_volume | 126 |
| creator | Allahyari, E. JJ Nivas, J. Avallone, G. Valadan, M. Singh, M. Granata, V. Cirillo, C. Vecchione, A. Bruzzese, R. Altucci, C. Amoruso, S. |
| description | •The variation of the craters generated by fs laser irradiation with repetition rate is investigated.•The influence of the laser pulse repetition rate on removal rate and surface texture on silicon is addressed.•Possible effects of plume shielding on crater features and laser surface structuring at high repetition rate is discussed.
The influence of the pulse repetition rate on laser irradiation of silicon, in air, with femtosecond laser pulses is experimentally investigated in the range 10 Hz – 200 kHz. The features of the produced crater and the laser-induced periodic surface structures generated on its surface are characterized by exploiting surface profilometry and scanning electron microscopy. The experimental characterization evidences an interesting influence of the pulse repetition rate on the crater size qualitatively addressing a progressive reduction of the material removal efficiency at higher repetition rates. Moreover, also the surface structures produced by an irradiation sequence with a fixed number of laser pulses (namely N = 100) shows a clear dependence on the repetition rate. The observed effects are rationalized by considering the possible influence of plume shielding and heat accumulation effects typically observed during laser processing with high repetition rate laser systems. |
| doi_str_mv | 10.1016/j.optlastec.2020.106073 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2440105635</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0030399219320134</els_id><sourcerecordid>2440105635</sourcerecordid><originalsourceid>FETCH-LOGICAL-c409t-fb4020a92c7cb0e4d27adf99665de04aaf1cb8257cfa2f7d9bfb016ee4f997313</originalsourceid><addsrcrecordid>eNqFkM1KxDAUhYMoOI4-gwHXHdM0bafuhsFRYUAXug5pegMpnabepKIrX93UqltXFw7nh_sRcpmyVcrS4rpduSF0ygfQK874pBaszI7IIl2XVcJzkR-TBWMZS7Kq4qfkzPuWMSaKPFuQzx0cgvOgXd_Q2AJI_YhGaaAWUTVWBet66gz1trPRRW1PlcUb-jR2HijCAMF-e1CFGOpNN0If41HRk4TUgAojgqcqbvy2B3ifxHNyYlQsuvi5S_Kyu33e3if7x7uH7WafaMGqkJhaxNdUxXWpawai4aVqTFUVRd4AE0qZVNdrnpfaKG7KpqpNHeEAiGgqszRbkqu5d0D3OoIPsnUj9nFSciFYyvIiy6OrnF0anfcIRg5oDwo_ZMrkRFu28o-2nGjLmXZMbuYkxCfeLKD02k4cGougg2yc_bfjC_dxkD0</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2440105635</pqid></control><display><type>article</type><title>Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture</title><source>ScienceDirect Journals (5 years ago - present)</source><creator>Allahyari, E. ; JJ Nivas, J. ; Avallone, G. ; Valadan, M. ; Singh, M. ; Granata, V. ; Cirillo, C. ; Vecchione, A. ; Bruzzese, R. ; Altucci, C. ; Amoruso, S.</creator><creatorcontrib>Allahyari, E. ; JJ Nivas, J. ; Avallone, G. ; Valadan, M. ; Singh, M. ; Granata, V. ; Cirillo, C. ; Vecchione, A. ; Bruzzese, R. ; Altucci, C. ; Amoruso, S.</creatorcontrib><description>•The variation of the craters generated by fs laser irradiation with repetition rate is investigated.•The influence of the laser pulse repetition rate on removal rate and surface texture on silicon is addressed.•Possible effects of plume shielding on crater features and laser surface structuring at high repetition rate is discussed.
The influence of the pulse repetition rate on laser irradiation of silicon, in air, with femtosecond laser pulses is experimentally investigated in the range 10 Hz – 200 kHz. The features of the produced crater and the laser-induced periodic surface structures generated on its surface are characterized by exploiting surface profilometry and scanning electron microscopy. The experimental characterization evidences an interesting influence of the pulse repetition rate on the crater size qualitatively addressing a progressive reduction of the material removal efficiency at higher repetition rates. Moreover, also the surface structures produced by an irradiation sequence with a fixed number of laser pulses (namely N = 100) shows a clear dependence on the repetition rate. The observed effects are rationalized by considering the possible influence of plume shielding and heat accumulation effects typically observed during laser processing with high repetition rate laser systems.</description><identifier>ISSN: 0030-3992</identifier><identifier>EISSN: 1879-2545</identifier><identifier>DOI: 10.1016/j.optlastec.2020.106073</identifier><language>eng</language><publisher>Kidlington: Elsevier Ltd</publisher><subject>Craters ; Direct fs laser surface processing ; Femtosecond pulses ; Irradiation ; Laser fabrication ; Laser processing ; Laser processing at high pulse repetition rate ; Lasers ; Pulse repetition rate ; Silicon ; Surface layers</subject><ispartof>Optics and laser technology, 2020-06, Vol.126, p.106073, Article 106073</ispartof><rights>2020 Elsevier Ltd</rights><rights>Copyright Elsevier BV Jun 2020</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c409t-fb4020a92c7cb0e4d27adf99665de04aaf1cb8257cfa2f7d9bfb016ee4f997313</citedby><cites>FETCH-LOGICAL-c409t-fb4020a92c7cb0e4d27adf99665de04aaf1cb8257cfa2f7d9bfb016ee4f997313</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.optlastec.2020.106073$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids></links><search><creatorcontrib>Allahyari, E.</creatorcontrib><creatorcontrib>JJ Nivas, J.</creatorcontrib><creatorcontrib>Avallone, G.</creatorcontrib><creatorcontrib>Valadan, M.</creatorcontrib><creatorcontrib>Singh, M.</creatorcontrib><creatorcontrib>Granata, V.</creatorcontrib><creatorcontrib>Cirillo, C.</creatorcontrib><creatorcontrib>Vecchione, A.</creatorcontrib><creatorcontrib>Bruzzese, R.</creatorcontrib><creatorcontrib>Altucci, C.</creatorcontrib><creatorcontrib>Amoruso, S.</creatorcontrib><title>Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture</title><title>Optics and laser technology</title><description>•The variation of the craters generated by fs laser irradiation with repetition rate is investigated.•The influence of the laser pulse repetition rate on removal rate and surface texture on silicon is addressed.•Possible effects of plume shielding on crater features and laser surface structuring at high repetition rate is discussed.
The influence of the pulse repetition rate on laser irradiation of silicon, in air, with femtosecond laser pulses is experimentally investigated in the range 10 Hz – 200 kHz. The features of the produced crater and the laser-induced periodic surface structures generated on its surface are characterized by exploiting surface profilometry and scanning electron microscopy. The experimental characterization evidences an interesting influence of the pulse repetition rate on the crater size qualitatively addressing a progressive reduction of the material removal efficiency at higher repetition rates. Moreover, also the surface structures produced by an irradiation sequence with a fixed number of laser pulses (namely N = 100) shows a clear dependence on the repetition rate. The observed effects are rationalized by considering the possible influence of plume shielding and heat accumulation effects typically observed during laser processing with high repetition rate laser systems.</description><subject>Craters</subject><subject>Direct fs laser surface processing</subject><subject>Femtosecond pulses</subject><subject>Irradiation</subject><subject>Laser fabrication</subject><subject>Laser processing</subject><subject>Laser processing at high pulse repetition rate</subject><subject>Lasers</subject><subject>Pulse repetition rate</subject><subject>Silicon</subject><subject>Surface layers</subject><issn>0030-3992</issn><issn>1879-2545</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNqFkM1KxDAUhYMoOI4-gwHXHdM0bafuhsFRYUAXug5pegMpnabepKIrX93UqltXFw7nh_sRcpmyVcrS4rpduSF0ygfQK874pBaszI7IIl2XVcJzkR-TBWMZS7Kq4qfkzPuWMSaKPFuQzx0cgvOgXd_Q2AJI_YhGaaAWUTVWBet66gz1trPRRW1PlcUb-jR2HijCAMF-e1CFGOpNN0If41HRk4TUgAojgqcqbvy2B3ifxHNyYlQsuvi5S_Kyu33e3if7x7uH7WafaMGqkJhaxNdUxXWpawai4aVqTFUVRd4AE0qZVNdrnpfaKG7KpqpNHeEAiGgqszRbkqu5d0D3OoIPsnUj9nFSciFYyvIiy6OrnF0anfcIRg5oDwo_ZMrkRFu28o-2nGjLmXZMbuYkxCfeLKD02k4cGougg2yc_bfjC_dxkD0</recordid><startdate>202006</startdate><enddate>202006</enddate><creator>Allahyari, E.</creator><creator>JJ Nivas, J.</creator><creator>Avallone, G.</creator><creator>Valadan, M.</creator><creator>Singh, M.</creator><creator>Granata, V.</creator><creator>Cirillo, C.</creator><creator>Vecchione, A.</creator><creator>Bruzzese, R.</creator><creator>Altucci, C.</creator><creator>Amoruso, S.</creator><general>Elsevier Ltd</general><general>Elsevier BV</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>202006</creationdate><title>Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture</title><author>Allahyari, E. ; JJ Nivas, J. ; Avallone, G. ; Valadan, M. ; Singh, M. ; Granata, V. ; Cirillo, C. ; Vecchione, A. ; Bruzzese, R. ; Altucci, C. ; Amoruso, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c409t-fb4020a92c7cb0e4d27adf99665de04aaf1cb8257cfa2f7d9bfb016ee4f997313</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Craters</topic><topic>Direct fs laser surface processing</topic><topic>Femtosecond pulses</topic><topic>Irradiation</topic><topic>Laser fabrication</topic><topic>Laser processing</topic><topic>Laser processing at high pulse repetition rate</topic><topic>Lasers</topic><topic>Pulse repetition rate</topic><topic>Silicon</topic><topic>Surface layers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Allahyari, E.</creatorcontrib><creatorcontrib>JJ Nivas, J.</creatorcontrib><creatorcontrib>Avallone, G.</creatorcontrib><creatorcontrib>Valadan, M.</creatorcontrib><creatorcontrib>Singh, M.</creatorcontrib><creatorcontrib>Granata, V.</creatorcontrib><creatorcontrib>Cirillo, C.</creatorcontrib><creatorcontrib>Vecchione, A.</creatorcontrib><creatorcontrib>Bruzzese, R.</creatorcontrib><creatorcontrib>Altucci, C.</creatorcontrib><creatorcontrib>Amoruso, S.</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Optics and laser technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Allahyari, E.</au><au>JJ Nivas, J.</au><au>Avallone, G.</au><au>Valadan, M.</au><au>Singh, M.</au><au>Granata, V.</au><au>Cirillo, C.</au><au>Vecchione, A.</au><au>Bruzzese, R.</au><au>Altucci, C.</au><au>Amoruso, S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture</atitle><jtitle>Optics and laser technology</jtitle><date>2020-06</date><risdate>2020</risdate><volume>126</volume><spage>106073</spage><pages>106073-</pages><artnum>106073</artnum><issn>0030-3992</issn><eissn>1879-2545</eissn><abstract>•The variation of the craters generated by fs laser irradiation with repetition rate is investigated.•The influence of the laser pulse repetition rate on removal rate and surface texture on silicon is addressed.•Possible effects of plume shielding on crater features and laser surface structuring at high repetition rate is discussed.
The influence of the pulse repetition rate on laser irradiation of silicon, in air, with femtosecond laser pulses is experimentally investigated in the range 10 Hz – 200 kHz. The features of the produced crater and the laser-induced periodic surface structures generated on its surface are characterized by exploiting surface profilometry and scanning electron microscopy. The experimental characterization evidences an interesting influence of the pulse repetition rate on the crater size qualitatively addressing a progressive reduction of the material removal efficiency at higher repetition rates. Moreover, also the surface structures produced by an irradiation sequence with a fixed number of laser pulses (namely N = 100) shows a clear dependence on the repetition rate. The observed effects are rationalized by considering the possible influence of plume shielding and heat accumulation effects typically observed during laser processing with high repetition rate laser systems.</abstract><cop>Kidlington</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.optlastec.2020.106073</doi></addata></record> |
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| issn | 0030-3992 1879-2545 |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Craters Direct fs laser surface processing Femtosecond pulses Irradiation Laser fabrication Laser processing Laser processing at high pulse repetition rate Lasers Pulse repetition rate Silicon Surface layers |
| title | Femtosecond laser surface irradiation of silicon in air: Pulse repetition rate influence on crater features and surface texture |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T09%3A48%3A45IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Femtosecond%20laser%20surface%20irradiation%20of%20silicon%20in%20air:%20Pulse%20repetition%20rate%20influence%20on%20crater%20features%20and%20surface%20texture&rft.jtitle=Optics%20and%20laser%20technology&rft.au=Allahyari,%20E.&rft.date=2020-06&rft.volume=126&rft.spage=106073&rft.pages=106073-&rft.artnum=106073&rft.issn=0030-3992&rft.eissn=1879-2545&rft_id=info:doi/10.1016/j.optlastec.2020.106073&rft_dat=%3Cproquest_cross%3E2440105635%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2440105635&rft_id=info:pmid/&rft_els_id=S0030399219320134&rfr_iscdi=true |