Critical evaluation of the state of the art of the analysis of light elements in thin films demonstrated using the examples of SiOXNY and AlOXNY films (IUPAC Technical Report)

The quantitative analysis of thin films containing light elements is very important in improving the coating processes and technological properties of the products. In order to review the state of the art of modern analytical techniques for such applications, the model systems SiO and AlO were selec...

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Veröffentlicht in:	Pure and applied chemistry 2004-01, Vol.76 (6), p.1161-1213
Hauptverfasser:	Dreer, Sabine, Wilhartitz, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Light elements Mathematical analysis State-of-the-art reviews Thin films
Online-Zugang:	Volltext
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