Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure

This paper reports the approach to boost the acoustic performances of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers) including vibrational amplitude, acoustic pressure and electromechanical coupling by using the pinning boundary structure. An analytical model is developed based on an ass...

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Veröffentlicht in:	Journal of microelectromechanical systems 2020-08, Vol.29 (4), p.585-591
Hauptverfasser:	Liang, Yue, Eovino, Benjamin, Lin, Liwei
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic coupling Amplitudes Computer simulation Mathematical models Micromachining Piezoelectric micromachined ultrasonic transducers Piezoelectricity pinned PMUT PMUT PMUT tilt sensor Transducers Ultrasonic transducers
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